Mems and Nanotechnology for Gas Sensors

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Opis: Mems and Nanotechnology for Gas Sensors - Chandan Kumar Sarkar, Sunipa Roy

How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor technology, MEMS and Nanotechnology for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/nanotechnology platform for gas sensor applications. This book outlines the microfabrication technology needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nanocrystalline ZnO-based microfabricated sensors, and nanostructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applications of MEMS and nanotechnology in different areas relevant to the sensor domain. In addition, the book includes: * An introduction to MEMS for MEMS materials, and a historical background of MEMS * A concept for cleanroom technology * The substrate materials used for MEMS * Two types of deposition techniques, including chemical vapour deposition (CVD) * The properties and types of photoresists, and the photolithographic processes * Different micromachining techniques for the gas sensor platform, and bulk and surface micromachining * The design issues of a microheater for MEMS-based sensors * The synthesis technique of a nanocrystalline metal oxide layer * A detailed review about graphene; its different deposition techniques; and its important electronic, electrical, and mechanical properties with its application as a gas sensor * Low-cost, low-temperature synthesis techniques * An explanation of volatile organic compound (VOC) detection and how relative humidity affects the sensing parameters MEMS and Nanotechnology for Gas Sensors provides a broad overview of current, emerging, and possible future MEMS applications. MEMS technology can be applied in the automotive, consumer, industrial, and biotechnology domains.Introduction Cleanroom Technology Microelectromechanical System Significance of MEMS References Substrate for MEMS Introduction Silicon: The Base Dielectrics References Deposition Physical Vapour Deposition Chemical Vapour Deposition Metallization References Photolithography: Pattern Transfer Introduction Photoresist for Structuring Some Important Properties of Photoresist Types of Photoresists: Negative and Positive Photoresists Designing of Mask Layout Photolithography Process Application of Photoresist and Prebake Alignment, Exposure, and Pattern Formation PR Developer and Postbake Stripping (Photoresist Removal) Some Advanced Lithographic Techniques Structuring MEMS: Micromachining Introduction Bulk Micromachining Surface Micromachining Etch-Stop Technique High-Aspect-Ratio Micromachining References Microheaters for Gas Sensor Introduction Need of Microheater Types of Microheater Microheater Design Issues Heater Material Selection Heater Geometry Selection Function of Interdigitated Electrode Software Used Heating Power Consumption Fabrication of Microheater Microheater Array References SENSOR APPLICATIONS Semiconductors as Gas Sensors Introduction Development of Semiconductor Sensors What Is a Nanosensor? Solid-State Chemical Sensors References Sensing with Graphene Introduction Properties of Graphene Characterization Techniques Synthesis of Single-Layer Graphene/Few-Layer Graphene Graphene Oxide Potential Application Summary References Nanocrystalline ZnO-Based Microfabricated Chemical Sensor Introduction Device Structure: Vertical and Horizontal Comparison of Vertical and Horizontal Structure Metal-Insulator-Metal Structure Nanocrystalline ZnO as Sensing Material Sensing Layer Deposition by Chemical Route References Nanostructures for Volatile Organic Compound Detection Introduction Volatile Organic Compounds Different Nanostructures Sensing Mechanism Measurement Technique Effect of Relative Humidity on VOC Detection References Sensor Interfaces Signal Processing Smart Sensors Interface Systems References MEMS- and Nanotechnology-Enabled Sensor Applications MEMS and Nanotechnology Automotive Applications: An Elaborated Study Home Appliances Aerospace Environmental Monitoring Process Engineering Medical Diagnostic References


Szczegóły: Mems and Nanotechnology for Gas Sensors - Chandan Kumar Sarkar, Sunipa Roy

Tytuł: Mems and Nanotechnology for Gas Sensors
Autor: Chandan Kumar Sarkar, Sunipa Roy
Producent: Productivity Press Inc
ISBN: 9781498700122
Rok produkcji: 2015
Ilość stron: 242
Oprawa: Twarda


Recenzje: Mems and Nanotechnology for Gas Sensors - Chandan Kumar Sarkar, Sunipa Roy

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Mems and Nanotechnology for Gas Sensors

,

How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor technology, MEMS and Nanotechnology for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/nanotechnology platform for gas sensor applications. This book outlines the microfabrication technology needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nanocrystalline ZnO-based microfabricated sensors, and nanostructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applications of MEMS and nanotechnology in different areas relevant to the sensor domain. In addition, the book includes: * An introduction to MEMS for MEMS materials, and a historical background of MEMS * A concept for cleanroom technology * The substrate materials used for MEMS * Two types of deposition techniques, including chemical vapour deposition (CVD) * The properties and types of photoresists, and the photolithographic processes * Different micromachining techniques for the gas sensor platform, and bulk and surface micromachining * The design issues of a microheater for MEMS-based sensors * The synthesis technique of a nanocrystalline metal oxide layer * A detailed review about graphene; its different deposition techniques; and its important electronic, electrical, and mechanical properties with its application as a gas sensor * Low-cost, low-temperature synthesis techniques * An explanation of volatile organic compound (VOC) detection and how relative humidity affects the sensing parameters MEMS and Nanotechnology for Gas Sensors provides a broad overview of current, emerging, and possible future MEMS applications. MEMS technology can be applied in the automotive, consumer, industrial, and biotechnology domains.Introduction Cleanroom Technology Microelectromechanical System Significance of MEMS References Substrate for MEMS Introduction Silicon: The Base Dielectrics References Deposition Physical Vapour Deposition Chemical Vapour Deposition Metallization References Photolithography: Pattern Transfer Introduction Photoresist for Structuring Some Important Properties of Photoresist Types of Photoresists: Negative and Positive Photoresists Designing of Mask Layout Photolithography Process Application of Photoresist and Prebake Alignment, Exposure, and Pattern Formation PR Developer and Postbake Stripping (Photoresist Removal) Some Advanced Lithographic Techniques Structuring MEMS: Micromachining Introduction Bulk Micromachining Surface Micromachining Etch-Stop Technique High-Aspect-Ratio Micromachining References Microheaters for Gas Sensor Introduction Need of Microheater Types of Microheater Microheater Design Issues Heater Material Selection Heater Geometry Selection Function of Interdigitated Electrode Software Used Heating Power Consumption Fabrication of Microheater Microheater Array References SENSOR APPLICATIONS Semiconductors as Gas Sensors Introduction Development of Semiconductor Sensors What Is a Nanosensor? Solid-State Chemical Sensors References Sensing with Graphene Introduction Properties of Graphene Characterization Techniques Synthesis of Single-Layer Graphene/Few-Layer Graphene Graphene Oxide Potential Application Summary References Nanocrystalline ZnO-Based Microfabricated Chemical Sensor Introduction Device Structure: Vertical and Horizontal Comparison of Vertical and Horizontal Structure Metal-Insulator-Metal Structure Nanocrystalline ZnO as Sensing Material Sensing Layer Deposition by Chemical Route References Nanostructures for Volatile Organic Compound Detection Introduction Volatile Organic Compounds Different Nanostructures Sensing Mechanism Measurement Technique Effect of Relative Humidity on VOC Detection References Sensor Interfaces Signal Processing Smart Sensors Interface Systems References MEMS- and Nanotechnology-Enabled Sensor Applications MEMS and Nanotechnology Automotive Applications: An Elaborated Study Home Appliances Aerospace Environmental Monitoring Process Engineering Medical Diagnostic References

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Cena 498,00 PLN
Nasza cena 465,62 PLN
Oszczędzasz 6%
Wysyłka: Niedostępna
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Szczegóły: Mems and Nanotechnology for Gas Sensors - Chandan Kumar Sarkar, Sunipa Roy

Tytuł: Mems and Nanotechnology for Gas Sensors
Autor: Chandan Kumar Sarkar, Sunipa Roy
Producent: Productivity Press Inc
ISBN: 9781498700122
Rok produkcji: 2015
Ilość stron: 242
Oprawa: Twarda


Recenzje: Mems and Nanotechnology for Gas Sensors - Chandan Kumar Sarkar, Sunipa Roy

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